STP-IXA2206 STP-IXA3306 STP-IXA4506涡轮分子泵

Vacuum pump EDWARDS STP Pump with Integrated Controller

The STP-iXA2206 series magnetically levitated turbomolecular pump provides industry-leading performance and incorporates a small power supply into the onboard control unit – the latest technology of the well-established STP-iXA2205 series. The height of the pump is equal to the STP-A2203C and is also equal to the height of the STP-iXA2205 series without it’s power supply (iPS-1200). This fully integrated product offers easy installation and a small footprint as an all-in-one solution for all application tools.

The STP-iXA3306 series magnetically levitated turbomolecular pump provides industry-leading performance and incorporates a small power supply into the onboard control unit – the latest technology of the well-established STPiXA3305 series.

The height of the pump is equal to the STP-XA2703/XA3203 and is also equal to the height of the STP-iXA3305 series without its power supply (iPS-1200). This fully integrated product offers easy installation and a small footprint as an all-in-one solution for all application tools.

Edwards STP-iXA4506 series magnetically levitated turbomolecular pump (TMP) uses state-of-the-art technology to provide industry-leading performance, improved gas flow capability and high temperature management for today’s challenging applications.

Applications

• Plasma etch (chlorine, fluorine and bromine chemestries) for metal (aluminium), tungsten and dialectric (oxide) and polysilicon
• Electron cyclotron resonance (ECR) etch
• Film deposition CVD, PECVD, ECRCVD, MOCVD
• Sputtering
• Ion implantation source, beam line pumping and station

Features and Benefits STP-iXA2206C& STP-iXA3306C

• Compact design including a fully integrated controller
• Innovative, self-sensing magnetic bearing system
• Digital 5-axis control
• Vibration levels reduced by 50% compared to the existing turbo pumps
• Can be configured to run corrosive processes

Features and Benefits STP-iXA4506

• The fully integrated controller and power supply eliminates the need for cables and a separate controller rack, resulting in a cost effective, compact TMP package that is fast and easy to install in a small footprint.
• Maximum continuous flow capability of 4300 sccm (N2), achieving a performance increase of more than 50%, when compared to STP-XA4503.
• The pump will operate efficiently with cooling water supply up to 35 °C.
• Temperature Management System (TMS) unit is available for processes generating by-products.
• I/O Remote, RS232C, RS485, STP-Link are standard ports.
• UL marked, CE marked, SEMI-S2 and RoHS compliant.

SPECIFICATIONS