产品[
Edwards iH600半导体真空泵
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产品名称:
Edwards iH600半导体真空泵
产品型号:
A59020957
产品展商:
Edwards
关注指数:6
产品文档:
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简单介绍
Edwards iH600半导体真空泵
的详细介绍
Edwards iH600 Semiconductor Dry Vacuum Pump - NEW
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
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Peak speed
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600 m3h-1
353 cfm
10,000 lmin-1
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Ultimate vacuum
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7 x 10-4 mbar
5.3 x 10-4 Torr
0.07 Pa
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Typical shaft seal nitrogen flow
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4 slm
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Inlet connection
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ISO100
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Outlet connection
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NW40
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Typical cooling water flow at 15 psi pressure drop
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240 lh-1
4 lmin-1
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Weight
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415 kg
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Power input at ultimate
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3.4 kW
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Rated motor power
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6.1 kW
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Oil capacity
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1.43 l
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Edwards iH600 Semiconductor Dry Vacuum Pump - NEW
A59020908 / A590-20-908 iH600 MK5 460V 60Hz three-phase
A59020945 / A590-20-945 iH600 MK5 200/208V 50/60Hz 3-phase
A59020946 / A590-20-946 iH600 MK5 380/415V 50/60Hz 3-phase
A59020957 / A590-20-957 iH600 MK5 230V 60Hz 3-phase
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