产品[
Edwards EPX180NE - NEW干式真空泵
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产品名称:
Edwards EPX180NE - NEW干式真空泵
产品型号:
A41944014
产品展商:
Edwards
关注指数:5
产品文档:
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简单介绍
Edwards EPX180NE - NEW干式真空泵
的详细介绍
Edwards EPX180NE 208V Semiconductor Dry Vacuum Pump - NEW
The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of < 7.5 x 10-5 Torr. The EPX NE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.
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Peak Speed
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170 m3h-1 / 105 ft3min-1 / 2,835 lmin-1
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Ultimate Vacuum
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< 1 x 104 mbar / < 7.5 x 10-5 / < 1 x 10-2 Pa Torr
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Warm up time (to nominal performance)
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30 min
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Inlet Flange
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ISO63
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Outlet flange
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NW25
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Noise
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< 59 dB(A)
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Minimum cooling water flow rate
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2 lmin-1
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Cooling water temperature
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15 - 35°C
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Nitrogen supply interface
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1/4 in (6.5 mm) tube
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Nitrogen supply pressure
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3 x 105 - 7 x 105 pa
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Minimum nitrogen purity
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99.95%
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Electrical supply
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400 V, 50/60 Hz 3-phase
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Power at ultimate
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1.4 kW
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Rated motor power
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3.0 kW
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TIM
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None
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Weight
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43.5 kg
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Edwards EPX180NE 208V Semiconductor Dry Vacuum Pump - NEW
A41944014 / A419-44-014 EPX180NE 400V No TIM 3/8 water connector
A41944212 / A419-44-212 EPX180NE 208V SPI TIM 3/8 water connector
A41944224 / A419-44-224 EPX180NE 400V SPI TIM 1/4 water connectors
A41944412 / A419-44-412 EPX180NE 208V TEL TIM 3/8 water connector
A41944414 / A419-44-414 EPX180NE 400V TEL TIM 3/8 water connectors
A41944424 / A419-44-424 EPX180NE 400V TEL TIM 1/4 water connectors
A41944512 / A419-44-512 EPX180NE 208V LAM TIM 3/8 water connector
A41944514 / A419-44-514 EPX180NE 400V LAM TIM 3/8 water connectors
A41944712 / A419-44-712 EPX180NE 208V MCM TIM 3/8 water connector
A41944714 / A419-44-714 EPX180NE 400V MCM TIM 3/8 water connectors
A41944724 / A419-44-724 EPX180NE 400V MCM TIM 1/4 water connectors
A41944012 / A419-44-012 EPX180NE 208V No TIM 3/8 water connector
OBSOLETED
A40902977 / A409-02-977 IPX100
A40902973 / A409-02-973 IPX100
A40904977 / A409-04-977 IPX100A
A40904973 / A409-04-973 IPX100A
A40924977 / A409-24-977 IPX180A
A40924973 / A409-24-973 IPX180A
A40914977 / A409-14-977 IPX500A
A40914973 / A409-14-973 IPX500A
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