产品[
Edwards EPX500LE半导体干式真空泵
]资料
如果您对该产品感兴趣的话,可以
产品名称:
Edwards EPX500LE半导体干式真空泵
产品型号:
A41953012
产品展商:
Edwards
关注指数:4
产品文档:
无相关文档
简单介绍
Edwards EPX500LE半导体干式真空泵
的详细介绍
Edwards EPX500LE 208V Semiconductor Dry Vacuum Pump - NEW
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of < 7 x 10-7 Torr. Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.
|
Peak Speed
|
500 m3h-1 / 295 ft3min-1 / 8,338 lmin-1
|
|
Ultimate Vacuum
|
< 1 x 10-6 mbar / < 7 x 10-7 Torr / < 1 x 10-4 Pa
|
|
Warm up time (to nominal performance)
|
30 min
|
|
Inlet Flange
|
ISO160
|
|
Outlet flange
|
NW25
|
|
Noise
|
< 59 dB(A)
|
|
Minimum cooling water flow rate
|
2 lmin-1
|
|
Cooling water temperature
|
15 - 35°C
|
|
Electrical supply
|
200/208 V, 50/60 Hz 3-phase
|
|
Power at ultimate
|
1.4 kW
|
|
Rated motor power
|
3.0 kW
|
|
TIM
|
None
|
|
Weight
|
45.2 kg
|
Edwards EPX500LE 208V Semiconductor Dry Vacuum Pump - NEW
A41953012 / A419-53-012 EPX500LE 208V No TIM 3/8 water connector
A41953014 / A419-53-014 EPX500LE 400V No TIM 3/8 water connectors
A41953312 / A419-53-312 EPX500LE 208V E73 TIM 3/8 water connector
A41953412 / A419-53-412 EPX500LE 208V TEL TIM 3/8 water connector
A41953712 / A419-53-712 EPX500LE 208V MCM TIM 3/8 water connector
OBSOLETED
A40902977 / A409-02-977 IPX100
A40902973 / A409-02-973 IPX100
A40904977 / A409-04-977 IPX100A
A40904973 / A409-04-973 IPX100A
A40924977 / A409-24-977 IPX180A
A40924973 / A409-24-973 IPX180A
A40914977 / A409-14-977 IPX500A
A40914973 / A409-14-973 IPX500A
- 温馨提示：为规避购买风险，建议您在购买前务必确认供应商资质与产品质量。
- 免责申明：以上内容为注册会员自行发布，若信息的真实性、合法性存在争议，平台将会监督协助处理，欢迎举报
