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Edwards iGX600N干泵

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如果您对该产品感兴趣的话,可以 产品名称: Edwards iGX600N干泵
产品型号: A54631958
产品展商: Edwards
关注指数:6
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简单介绍

Edwards iGX600N干泵  的详细介绍

Edwards iGX600N Semiconductor Dry Vacuum Pump - NEW

The iGX dry vacuum pump series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.

iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.

iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

Peak speed 620 m3h-1 / 365 cfm
Ultimate pressure 7.00E-04 mbar / 5.25E-04 Torr
Power at 700 Torr exhaust
Ultimate 1.6 kW
AUC (Active Utility Controller)     0.05 kW
Water inlet 2 slm
Nitrogen 4 or 14 slm
Footprint excluding exhaust 0.20 m2
Weight 220 kg
Inlet connectiom ISO100
Outlet connection NW25
Noise at ultimate < 55 dB(A)
Edwards iGX600N Semiconductor Dry Vacuum Pump - NEW

A54631958 / A546-31-958  iGX600N  200-230V 50/60 Hz
A54631959 / A546-31-959  iGX600N  380-460V 50/60 Hz

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