产品[
Edwards iXH610爪式真空泵组
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产品名称:
Edwards iXH610爪式真空泵组
产品型号:
ACB102121100
产品展商:
Edwards
关注指数:38
产品文档:
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简单介绍
Edwards iXH610爪式真空泵组
的详细介绍
Edwards iXH610 HV Semiconductor Dry Vacuum Pump
Features include:
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More process capability
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Greatly increased powder handling capability and innova ve Gas BusterTM technology
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Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation
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Innovative pump seal technology to lengthen process life and reduce leakage risks
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High capacity dry pumps and boosters give an expanded process window to enhance yields
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Reduced cost of ownership
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10% less energy consump on than the previous model
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SEMI® E54 compatible and Green Mode capable
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Longer overhaul intervals and less unscheduled down me
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Complies with key interna onal standards including UL, CE and S2
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Dry pump size
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100 m3/h
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Booster size
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600 m3/h
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Peak speed
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665 m3/h
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Ultimate vac (typical)
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3.7 x 10-3 Torr
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System power at ult.
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2.6 kW
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Inlet connection
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ISO 100
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Outlet connection
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NW 40
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Typical water flow
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3 l/m
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Purge flow range
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22/44 slm
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Weight
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355 kg
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Edwards iXH610 HV Semiconductor Dry Vacuum Pump
ACB102121100
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