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Edwards iXH1210H 半导体真空泵
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产品名称:
Edwards iXH1210H 半导体真空泵
产品型号:
AC310A121200
产品展商:
Edwards
关注指数:39
产品文档:
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简单介绍
Edwards iXH1210H 半导体真空泵
的详细介绍
Edwards iXH1210H Semiconductor Dry Vacuum Pump 480V - REBUILT
AC3A06122200 iXH1210 200-230V 50/60Hz
AC310A121200 iXH1210 200-230V 50/60Hz (MM44)
NRY433000 iXH1210 480V 50/60Hz
Edwards iXH1210H Semiconductor Dry Vacuum Pump
Features include:
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More process capability
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Greatly increased powder handling capability and innova ve Gas BusterTM technology
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Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation
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Innovative pump seal technology to lengthen process life and reduce leakage risks
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High capacity dry pumps and boosters give an expanded process window to enhance yields
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Reduced cost of ownership
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10% less energy consump on than the previous model
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SEMI® E54 compatible and Green Mode capable
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Longer overhaul intervals and less unscheduled down me
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Complies with key interna onal standards including UL, CE and S2
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Greatly increased hydrogen pumping speed for advanced EPI and solar processes
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Smaller footprint and lower height for ease of fi ng in any fab
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Dry pump size
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100 m3/h
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Booster size
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1,200 m3/h
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Peak speed
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1,065 m3/h
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Ultimate vac (typical)
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3.7 x 10-3 Torr
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System power at ult.
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3.9 kW
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Inlet connection
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ISO 100
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Outlet connection
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NW 40
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Typical water flow
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4.2 l/m
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Purge flow range
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22/44/60 slm
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Weight
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413 kg
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