产品[
真空传输阀V72_All Heating Type
]资料
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产品名称:
真空传输阀V72_All Heating Type
产品型号:
产品展商:
Edwards
关注指数:39
产品文档:
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简单介绍
真空传输阀V72_All Heating Type
的详细介绍
|
Fitting Standard
|
Nonstandard
|
|
Gate Size (mm)
|
50 x 322
|
|
Pressure Range
|
<1.0 x E-6 ~ 1.2 x E5 Pa (abs)
|
|
Helium Leak Rate
|
Housing
|
<8.0 x E-8 mbar*l/s
|
|
Internal
|
<8.0 x E-8 mbar*l/s
|
|
Feed Through
|
Welded bellows seal
|
|
Pneumatic Actuator Type
|
Double acting
|
|
Air Connection
|
OD Ø 1/4″
|
|
Air Pressure
|
0.5MPa (Tolerance level : 0.45 ~ 0.6 MPa)
|
|
Air Less Lock
|
Open
|
N/A
|
|
Close
|
LOCK
|
|
Life Cycles
|
Mechanism
|
2,000,000
|
|
Bellows
|
2,000,000
|
|
O-Ring(Seal)
|
1,000,000
|
|
Lubrication
|
1,000,000
|
|
Temperature
|
Body
|
≤180 °C
|
|
Actuator
|
≤150 °C
|
|
Lubrication
|
Vacuum inside
|
Non lubrication
|
|
Mechanism
|
PFPE Grease
|
|
Materials
|
Valve Housing
|
AL 6061
|
|
Gate(Seat)
|
AL 6061
|
|
Bonnet
|
STS 316L
|
|
Shaft(stem)
|
STS 316L
|
|
Bellows
|
AM350
|
|
Bellows End Piece
|
STS 316L
|
|
Vacuum Seal
|
FFKM
|
|
Pneumatic Seal
|
FKM
|
|
Surface Treatment
|
Valve Housing
|
Bare
|
|
Gate(Seat)
|
Bare
|
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