产品[
真空传输阀V73-P_Two-way sealing, LAM facility
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产品名称:
真空传输阀V73-P_Two-way sealing, LAM facility
产品型号:
产品展商:
Edwards
关注指数:40
产品文档:
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简单介绍
真空传输阀V73-P_Two-way sealing, LAM facility
的详细介绍
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Fitting Standard
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Nonstandard
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Gate Size (mm)
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28mm x 222mm (1.1 x 8.7inch)
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Pressure Range
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1.0xE-3 ~ 1.2xE5 Pa (abs)
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Differential pressureon the gate
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in closing direction
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≤ 0.12 Mpa
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in opening direction
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≤ 0.12 Mpa
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Differential pressure at opening
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≤ 0.01 MPa
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Helium leak rate
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Housing
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< 1.0xE-10 Pa*㎥/sec
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Seat (Gate)
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PM: <1.3xE-5 Pa*㎥/sec (Hard Anodizing)
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TM: <1.3xE-10 Pa*㎥/sec
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Open / Close Time
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<2sec (Switch to switch)
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Mounting Posture
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Drive section is turnedto the top or bottom
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Life Cycles
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Mechanism
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3,000,000 cycles
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Bellows
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3,000,000 cycles
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O-Ring (Seal)
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1,000,000 cycles
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Lubrication
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1,000,000 cycles(under clean operating conditions)
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Bake-out Temperature
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Max. 120°C (Max. 60°C for air cylinders)
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Pneumatic pressure(Compressed air pressure)
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0.5 Mpa (Tolerance Level : 0.45~0.6 Mpa)
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Weight
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<16 kgf
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Material
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Gate (Blade)
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AL6061
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Bellows
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AM350
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Seal plate (Bonnet)
|
AL6061
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Actuator
|
AL6061, STS304, Etc
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Shaft (Stem)
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STS304
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Gate (Blade) seal
|
FKM (VITON®)
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Pneumatic seal
|
FKM (VITON®)
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Grease (Pneumatic)
|
PFPEGrease
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Surface treatment
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Gate (Blade)
|
(PM) Anodizing (TM) Anodizing
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Shaft (Stem)
|
Bare
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Actuator
|
Anodizing
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Speed controller connection tube diameter
|
6ea Φ4Tube, Meter-out type°
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