产品[
真空传输阀V7C-P_Dual Gate Valve
]资料
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产品名称:
真空传输阀V7C-P_Dual Gate Valve
产品型号:
产品展商:
Edwards
关注指数:46
产品文档:
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简单介绍
真空传输阀V7C-P_Dual Gate Valve
的详细介绍
|
Fitting Standard
|
SEMI E21.1-1296
|
|
Gate Size (mm)
|
50mm x 336mm
|
|
Pressure Range
|
1.0 X E-4 ~ 1.2 X E5 Pa (abs)
|
|
Helium Leak Rate
|
TM Valve
|
External
|
< 1.0 X E-10 Pa*m³/sec
|
|
Internal
|
< 1.0 X E-10 Pa*m³/sec
|
|
L/L Valve
|
External
|
< 1.0 X E-10 Pa*m³/sec
|
|
Internal
|
< 1.0 X E-8 Pa*m³/sec
|
|
Feed Through
|
TM Valve
|
O-Ring Seal
|
|
L/L Valve
|
Welded Bellows Seal
|
|
Actuator Type
|
PM _ Double Acting , TM _ Manual
|
|
Air Connection
|
OD Ø6 / one-touch type / Speed Controller (Meter-out)
|
|
Air Pressure
|
0.5 Mpa
(Tolerance level : 0.45 ~ 0.6 MPa)
|
|
Life Cycles
|
TM VALVE
|
1,000,000
|
|
PM VALVE
|
3,000,000
|
|
Temperature
|
Housing
|
≤ 120℃
|
|
Actuator
|
≤ 60℃
|
|
Lubrication
|
Vacuum inside
|
Non lubrication
|
|
Mechanism
|
PFPE Grease
|
|
Air Cylinder
|
PAO Grease
|
|
Materials
|
Valve Housing
|
AL 6061
|
|
Gate(Seat)
|
AL 6061
|
|
Bonnet
|
AL 6061
|
|
Shaft(stem)
|
STS 304
|
|
Bellows
|
AM350
|
|
Bellows End Piece
|
STS 316L
|
|
Gate Seal
|
TM Valve
|
FKM
|
|
L/L Valve
|
FFKM
|
|
Vacuum Seal
|
FKM
|
|
Pneumatic Seal
|
FKM
|
|
Surface Treatment
|
Valve Housing
|
Hard Anodizing
(<50 ㎛, Seal Surface :Bare)
|
|
Gate (Seat)
|
PM :Anodizing (Surface :Bare)
TM : Anodizing
|
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