产品[
真空传输阀V70-P_Standard Type(Double Cylinder)
]资料
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产品名称:
真空传输阀V70-P_Standard Type(Double Cylinder)
产品型号:
产品展商:
Edwards
关注指数:33
产品文档:
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简单介绍
真空传输阀V70-P_Standard Type(Double Cylinder)
的详细介绍
|
Fitting Standard
|
Nonstandard
|
|
Gate Size (mm)
|
39.6mmx 329mm
|
|
Pressure Range
|
<1.0 X E-7 ~ 1.2 X E5 Pa (abs)
|
|
Helium Leak Rate
|
External
|
<1.0 X E-10 Pa*㎥/sec
|
|
Internal
|
<1.3 X E-10 Pa*㎥/sec
|
|
Feed Through
|
Welded bellows seal
|
|
Pneumatic Actuator Type
|
Double acting
|
|
Air Connection
|
ODØ6 / one-touch type / Speed Controller (Meter-out)
|
|
Air Pressure
|
0.5MPa(Tolerance level : 0.45 ~ 0.6 Mpa)
|
|
Air Less Lock
|
Open
|
Lock
|
|
Close
|
Lock
|
|
Life Cycles
|
Mechanism
|
3,000,000
|
|
Bellows
|
3,000,000
|
|
O-Ring(Seal)
|
1,000,000
|
|
Lubrication
|
1,000,000
|
|
Temperature
|
Gate(seat)
|
≤120 °C
|
|
Actuator
|
≤60 °C
|
|
Lubrication
|
Vacuum inside
|
Non lubrication
|
|
Mechanism
|
PFPE Grease
|
|
Materials
|
Valve housing
|
AL6061
|
|
Gate(seat)
|
AL6061
|
|
Bonnet
|
AL6061
|
|
Shaft(Stem)
|
STS304
|
|
Bellows
|
AM350
|
|
Bellows end Piece
|
STS304
|
|
Vacuum seal
|
FKM
|
|
Pneumatic seal
|
FKM
|
|
Surface Treatment
|
Valve housing
|
Bare
|
|
Gate(Blade)
|
Bare
|
|
Actuator
|
Anodizing
|
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