产品[
Edwards iH160 半导体爪式真空泵
]资料
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产品名称:
Edwards iH160 半导体爪式真空泵
产品型号:
A59010945
产品展商:
Edwards
关注指数:50
产品文档:
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简单介绍
Edwards iH160 半导体爪式真空泵
的详细介绍
Edwards iH160 Semiconductor Dry Vacuum Pump - NEW
Edwards advanced semiconductor vacuum pumps have been field-proven to
perform to the highest operating standards. Reliability and high
performance are achieved by extending service life, improving uptime and
increasing productivity, while minimizing footprint and cost of
ownership.
The iH Series offers high reliability for difficult processes, such
as PECVD and LPCVD, where particulate, condensable and corrosive
by-products are present.
|
Peak speed
|
165 m3h-1
97 cfm
2,750 lmin-1
|
|
Ultimate vacuum
|
1 x 10-2 mbar
7.5 x 10-3 Torr
1 Pa
|
|
Typical shaft seal nitrogen flow
|
4 slm
|
|
Inlet connection
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ISO63
|
|
Outlet connection
|
NW40
|
|
Typical cooling water flow at 15 psi pressure drop
|
120 lh-1
2 lmin-1
|
|
Weight
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244 kg
|
|
Power input at ultimate
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3.1 kW
|
|
Rated motor power
|
5.0 kW
|
|
Oil capacity
|
0.85 l
|
All figures are typical without gas ballast.
Edwards iH160 Semiconductor Dry Vacuum Pump - NEW
A59010908 / A590-10-908 iH160 460V 60Hz three-phase
A59010945 / A590-10-945 iH160 200/208V 50/60Hz 3-phase
A59010946 / A590-10-946 iH160 380/415V 50Hz 3-phase
A59010957 / A590-10-957 iH160 230V 60Hz 3-phase
A53391945 / A533-91-945 iH160 200-208V 50/60Hz
A53506945 / A535-06-945 iH160 (VA) 200-208 50/60HZ
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