产品[
Edwards iXL120干式真空泵
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产品名称:
Edwards iXL120干式真空泵
产品型号:
A54113010
产品展商:
Edwards
关注指数:51
产品文档:
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简单介绍
Edwards iXL120干式真空泵
的详细介绍
Edwards iXL120 Semiconductor Dry Vacuum Pump - NEW
The iXL120 is a low energy, compact dry pump system that can be
mounted on tool or remotely. It is designed to give extremely low cost
of ownership. The iXL120 is intended only for use on clean duty
applications. The iXL120 is not intended for use with potentially
flammable, corrosive, toxic or other hazardous gases since these gases
or oxygen can mix within the pump system.
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Typical peak pumping speed (no gas purge/cold pump)
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110 m3/h-1 / 65 cfm
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Ultimate pressure
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0.01 mbar / 8 mTorr
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Pump inlet flange
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ISO-63 / NW50
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Exhaust gas outlet
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NW25
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Intended use
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Indoor use
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Operating ambient temperature range
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5 to 40°C
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Storage ambient temperature range
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-45 to 55°C
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Maximum relative humidity
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80% for temperatures up to 31°C decreasing linearly to 50% relative humidity at 40°C
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Maximum operating altitude
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up to 2,000 m
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Pollution degree
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II (IEC 61010) (Normally only non-conductive
pollution occurs. Occasionally, however, temporary conductivity caused
by condensation must be expected)
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Atmosphere
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Non flammable and non-corrosive
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Degree of protection provided by enclosure
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IP31D (EN60529: Degrees of protection provided by enclosures)
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Dimensions
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450 x 230 x 275 mm
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Mass
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59 kg
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Noise level (at ultimate)
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< 55 dB(A)
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Vibration level at inlet
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< 1.5 mm s-1
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Vibration to the floor (when docked)
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< 0.05 mm s-1
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Initial force to push the pump
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0.06 kN
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Sustained force to push the pump
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0.04 kN
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Warm up time to nominal pumping performance
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45 min
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Edwards MODEL iXL120 Semiconductor Dry Vacuum Pump - NEW
CODE No A541-13-010 / A54113010 iXL120E 200-460V 3/8 QC Water Fittings
CODE No A541-13-020 / A54113020 iXL120E 200-460V 1/4 QC Water Fittings
CODE No A541-13-610 / A54113610 iXL120E 200-460V HIT 3/8 QC Water Fittings
A541-13-710 / A54113710 iXL120E 200-460V MCM 3/8 QC Water Fittings
A541-13-011 / A54113011 iXL120E 200-460V 3/8 QC Water Fittings Flow Cont Valve
A541-13-221 / A54113221 iXL120E 200-460V SPI 1/4 QC Water Fittings Flow Cont Valve
A541-13-611 / A54113611 iXL120E 200-460V HIT 3/8 QC Water Fittings Flow Cont Valve
A541-13-711 / A54113711 iXL120E 200-460V MCM 3/8 QC Water Fittings Flow Cont Valve
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