产品[
Edwards iGX600M干式真空泵
]资料
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产品名称:
Edwards iGX600M干式真空泵
产品型号:
A54632958
产品展商:
Edwards
关注指数:43
产品文档:
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简单介绍
Edwards iGX600M干式真空泵
的详细介绍
Edwards iGX600M Semiconductor Dry Vacuum Pump - NEW
The iGX dry vacuum pump series sets new standards for zero
maintenance between major overhauls. Improved efficiency lowers the cost
of ownership and provides continuous pumping duty throughout the
pressure range.
iGX dry pumps include Ethernet connectivity allowing key data to be
viewed via web pages, as well as a comprehensive set of networking
options to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants
to address applications from clean through to medium-duty processes. A
modular design allows users to configure iGX drypumps to suit individual
fab requirements. An ultra-compact footprint allows installation
options including on-tool, close proximity, or remote.
|
Peak Speed
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620 m3h-1 / 365 cfm
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Ultimate Pressure
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7.00E-04 mbar / 5.25E-04 Torr
|
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Power at 700 Torr exhaust
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Ultimate
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1.6 kW
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AUC (Active Utility Controller)
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0.05 kW
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|
Water inlet
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2 slm
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Nitrogen
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4 or 14 slm
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Footprint excluding exhaust
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0.20 m2
|
|
Weight
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220 kg
|
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Inlet connection
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ISO100
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Outlet connection
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NW25
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Edwards iGX600M Semiconductor Dry Vacuum Pump - NEW
A54632958 / A546-32-958 iGX600M 200-230V 50/60 Hz
A54632959 / A546-32-959 iGX600M 380-460V 50/60 Hz
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