产品[
Edwards STPXA4503C磁悬浮分子泵
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产品名称:
Edwards STPXA4503C磁悬浮分子泵
产品型号:
YT670Z000
产品展商:
Edwards
关注指数:15
产品文档:
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简单介绍
Edwards STPXA4503C磁悬浮分子泵
的详细介绍
Edwards STP-XA4503C Turbomolecular Vacuum Pump - NEW
The STP-XA4503C magnetic bearing turbomolecular pump has a wide process window, from high vacuum, to high flow requirements with enhanced throughput for all gases.
This pump is based on a new design, offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition.
It has been designed to handle light and harsh duty applications, such as etch, implant, lithography and FPD processes.
Advanced Rotor Design
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Increased Argon performance
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Highest pumping speed in its class
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Wide process window
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Higher throughput at lower pressure
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Maintenance free
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Harsh process compatible
5-Axis Magnetic Suspension System
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Zero contamination
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Low vibration
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High reliability
Optimized Temperature Distribution
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Low deposition
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Built-in cooling mechanism
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Higher gas throughput
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Increased operating life
Certifications
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Conforms to international safety standards
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UL listed, CE marked and SEMI® S2 compliant
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Inlet flange
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VF-300 / ISO-320F / VG-350
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|
Backing port
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KF-40
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|
Pumping speed
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N2
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3,800 l/s
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H2
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2,500 l/s
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|
Compression ratio
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N2
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> 108
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H2
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> 6 x 103
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Ultimate pressure
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10-7 Pa
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Max. allowable backing pressure
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266 Pa
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Max. allowable gas flow
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N2 (water cooled)
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2,800 sccm (4.73 Pam3s-1)
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Ar (water cooled)
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2,150 sccm (3.63 Pam3s-1)
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|
Rated speed
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27,500 rpm
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|
Starting time
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12 min
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Mounting position
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Any
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Water cooling
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|
Flow
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3 l/min-1
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Pressure
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0.3 MPa
|
|
Temperature
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5 - 25°C
|
|
Input voltage
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200 to 240 VAC
|
|
Recommended purge gas flow
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50 sccm
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|
Input voltage
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200 to 240 VAC
|
|
Max input power
|
1.5 KVA
|
Edwards STP-XA4503C Turbomolecular Vacuum Pump - NEW
P/N YT67-0Z-040 / YT670Z040 STP-XA4503C ISO-320F
|
YT670Z000
|
P067 XA4503C PUMP VG350 KF10
|
|
YT670Z010
|
P067 XA4503C PUMP ISO400F KF10
|
|
YT670Z040
|
P067 XA4503C PUMP ISO320F KF10
|
|
YT670Z100
|
P067 XA4503C PUMP ICF458/DN400CF KF40
|
|
YT6706010
|
P067 XA4503CV PUMP VG350 KF10 W/HEATER
|
|
YT6716000
|
P067 XA4503CV PUMP ISO320F KF10 W/HEATER
|
|
YT76Z0Z00
|
P076 SCU-1600 CONTROLLER 200-240V
|
|
B75030010
|
P035 CONNECTION CABLE 5M PS/CS/MS
|
|
B75030020
|
P035 POWER CABLE 5M RING TERMINAL
|
|
PT660V010
|
P066 TMS CABLE KIT 5M
|
|
PT660V020
|
P066 TMS CABLE KIT 10M
|
|
PT660V030
|
P066 TMS CABLE KIT 15M
|
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