Edwards STP-XA2703C Turbomolecular Vacuum Pump - NEW
The STP-XA2703C turbo pump offers high performance in the process range of high vacuum to 2,300 sccm process flow with enhanced throughput for all gases.
This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition.
The outstanding performance is suited to both light and harsh applications, such as semiconductor etch, implant, lithography and LCD processes.
Advanced Rotor Design
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Increased H2, N2 and Ar performance
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Improved performance in the process pressure range of high vacuum to 2,300 sccm
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Maintenance free
5-Axis Magnetic Suspension System
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Zero contamination
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Low vibration
Innovative Torque Management
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Patented torque reduction mechanism
Optimized Temperature Management
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High temperature TMS capability
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Low deposition
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Built-in cooling mechanism
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Higher gas throughput heated and unheated
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Optimized life
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Harsh process compatible
Certifications
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SEMI® compliant, CE Marked and UL Listed
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Inlet flange
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VG-250
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Outlet port
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KF-40
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Purge port
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KF-10
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Pumping speed
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N2
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2,650 l/s
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H2
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2,050 l/s
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Compression ratio
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N2
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> 108
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H2
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> 6 x 103
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Ultimate pressure
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10-7 Pa
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Max. allowable backing pressure
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266 Pa
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Max. allowable gas flow
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N2 (water cooled)
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2,300 sccm (3.8 Pam3s-1)
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Ar (water cooled)
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1,900 sccm (3.2 Pam3s-1)
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Rated speed
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27,500 rpm
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Starting time
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< 8 min
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Mounting position
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Any
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Water cooling flow
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3 l/min-1
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Water cooling temperature
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5 - 25°C
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Pressure
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0.3 MPa
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Recommended purge gas flow
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50 sccm
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Input voltage
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200 to 240 VAC
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Power consumption
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1.5 kVA
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Input voltage
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200 to 240 VAC
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Pump weight
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75 kg
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Edwards STP-XA2703C Turbomolecular Vacuum Pump - NEW
P/N YT66-0Z-110 / YT660Z110 STP-XA2703C VG-250
P/N PT66-0Z-140 / PT660Z140 STP-XA2703C ISO-250
P/N YT66-10-010 / YT6610010 STP-XA2703C DN 250 CF
STP-XA2703BV3 CORROSIVE RESISTANT TURBO PUMP WITH TMS, 85 DEG C, 2700 L/S, DN 250 ISO-F INLET, MAXIMUM ARGON THROUGHPUT 2000 SCCM, 5 AXIS ACTIVE MAGNETIC SUSPENSION VIA DIGITAL DISPLAY CONTROLLER,MAXIMUM FORELINE PRESSURE 2.5 TORR, WATER COOLED, KF10 PURGE PORT, TMS EXTERNAL SENSOR
