产品[
Edwards STP1003/C高真空涡轮分子泵
]资料
如果您对该产品感兴趣的话,可以
产品名称:
Edwards STP1003/C高真空涡轮分子泵
产品型号:
YT390Z001
产品展商:
Edwards
关注指数:29
产品文档:
无相关文档
简单介绍
Edwards STP1003/C高真空涡轮分子泵
的详细介绍
Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW
Edwards corrosion resistant STP1003C is a new turbomolecular pump for use in the most advanced of semiconductor applications. Edwards’s rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
-
Maximized process flexibility
-
Oil free
-
Low vibration
-
High reliability
-
Maintenance free
-
Harsh process compatible (C version)
-
Increased life
Advanced Controller Design
-
Auto tuning
-
Self diagnostic functions
-
DC motor drive
-
Battery-free operation
Compact Design
-
Small footprint
-
Half rack controller
|
Inlet flange
|
ISO-200F
|
|
Outlet port
|
KF-40
|
|
Purge port
|
KF-10
|
|
Water cooling fitting
|
PT1/4
|
|
Pumping speed
|
|
N2
|
1,000 l/s
|
|
H2
|
800 l/s
|
|
Compression ratio
|
|
N2
|
> 108
|
|
H2
|
105
|
|
Ultimate pressure w/ bake out heating
|
10-7 Pa (10-9 Torr)
|
|
Max. continuous outlet pressure
|
13 Pa (0.1 Torr)
|
|
Max. nitrogen throughput
|
2,500 sccm
|
|
Rated speed
|
35,000 rpm
|
|
Starting time
|
6 min
|
|
Max inlet flange temperature
|
120°C
|
|
Input voltage
|
100 to 120
|
|
Power consumption
|
0.8 kVA
|
|
Weight
|
31 kg
|
Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW
P/N YT39-0Z-001 / YT390Z001 STP1003 ISO-200F
P/N YT39-B0-010 / YT39B0010 STP1003 DN 200 CF
P/N YT39-B0-130 / YT39B0130 STP1003C ISO-200F
PT39-AZ-003 / PT39AZ003 STP1003C DN 200 CF
- 温馨提示：为规避购买风险，建议您在购买前务必确认供应商资质与产品质量。
- 免责申明：以上内容为注册会员自行发布，若信息的真实性、合法性存在争议，平台将会监督协助处理，欢迎举报
