产品[
Edwards STPA803C高真空分子泵
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产品名称:
Edwards STPA803C高真空分子泵
产品型号:
YT36B0010
产品展商:
Edwards
关注指数:28
产品文档:
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简单介绍
Edwards STPA803C高真空分子泵
的详细介绍
Edwards STPA803C Turbomolecular Vacuum Pump - NEW
Edwards STPA803C turbomolecular pump is designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA803C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
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Maximized process flexibility
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Oil free
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Low vibration
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High reliability
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Maintenance free
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Harsh process compatible
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Increased life
Advanced Controller Design
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Auto tuning
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Self diagnostic functions
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DC motor drive
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Battery-free operation
Compact Design
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Small footprint
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Half rack controller
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Inlet flange
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ISO160F
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Outlet port
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KF40
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Purge port
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KF10
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Water cooling fitting
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PT1/4
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Pumping Speed
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|
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N2
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800 l/s
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H2
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520 l/s
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Compression ratio
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|
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N2
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>108
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H2
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103
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Ultimate pressure with bake out heating
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10-7 Pa (10-9 Torr)
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|
Max continuous outlet pressure
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270 Pa (2 Torr)
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Max Nitrogen throughput
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1500 sccm
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|
Rated speed
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32500 rpm
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Starting time
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7 min
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Max inlet flange temperature
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120 °C
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Input voltage
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200 to 240 (± 10) V a.c.
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|
Power consumption
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0.85 kVA
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|
Pump weight
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39 kg
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|
Controller weight
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9 kg
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Edwards STPA803C Turbomolecular Vacuum Pump - NEW
P/N YT36-B0-040 / YT36B0040 STPA803C ISO-160F
P/N YT36-B0-010 / YT36B0010 STPA803C DN 160 CF
P/N YT36-26-000 / YT3626000 STPA803CV ISO-160F TMS
YT36-26-003 / YT3626003 STPA803CV DN 160 CF TMS
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