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产品名称:
日本SMC油雾器/AM550-06BD
产品型号:
AM550-06BD
产品展商:
SMC
关注指数:706
产品文档:
无相关文档
简单介绍
日本SMC油雾器/AM550-06BD
Operating pressure range (MPa) (G)
External leak Note 2) (Pa穖3/s)
Operation temperature Note 3) (癈)
Internal leak Note 2) (Pa穖3/s)
日本SMC油雾器/AM550-06BD
的详细介绍
日本SMC油雾器/AM550-06BD
Note 1) Absolute pressure Note 2) Value at
normal temperature: Not including gas permeation.
Note 3) If the temperature at the gate exceeds 60°C
, the operating temperature at actuator may go beyond the
Note 4) This shows the time after the switching
valve activates and causes the gate to open and close.
Note 5) The holding function of the seal i
s not guaranteed when the gate is clamped.
Auto switch specifications
系列/CAD 使用压力范围 (Pa) 使用流体 门尺寸
XGT 大气压～1×10-6 惰性气体系的真空 32×222
特长 对于半导体装置等场合、
适合于负载锁定室和传送室以及传
送室和过程室之间有门阀隔开的场合。
Low particle generation
With end lock mechanism
Can be held open/close of the gate when emergency stop.
Service life of two million cycles.
Opening window size (Height x Width) (mm)
Operating environmental pressure Note 1) (Pa) (abs)
Operating pressure differential (kPa)
Internal leak Note 2) (Pa穖3/s)
at reversed pressure
[Reversed pressure: 0.1 MPa (abs) or less]
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